Measurement of a time dependent spatial beam profile of an RF-driven H ion source

Wada, Motoi*; Shinto, Katsuhiro; Shibata, Takanori*; Sasao, Mamiko*

Review of Scientific Instruments, 91(1), p.013330_1 - 013330_5, 2020/01

https://doi.org/10.1063/1.5128015

The ions are extracted from an ion source through a plasma sheath where a low frequency electromagnetic induction drives transport of charged particles including the target ions. High frequency alternating current commonly excites plasmas in sources for negative hydrogen (H) ions at a frequency in the MHz range. A high-speed beam current monitor system coupled to a narrow entrance slit enabled the investigation of the special distribution of the AC component intensity of the H ion beam extracted from an ion source driven by a 2 MHz radio frequency (RF) power. The distribution showed a smaller oscillation of the beam at the center.